Pressure sensor used in marine hydrographic survey is an important device for the deep sea detection, the tsunami forecast and the marine engineering. Owing to its mature technology process and low production cost, silicon piezoresistive sensor is widely applied in the field of industrial pressure measurement. However, its temperature effect can result in non-negligible dynamic error, which cannot meet requirement of deep sea environment. The silicon-on-sapphire pressure sensor based on stress cup structure is presented. The output voltage values show a high deviation in the range of −6∼50°C due to temperature drift. In order to minimise this temperature effect, a temperature compensation algorithm is proposed to realise 0.03% accuracy in the full scale 60 MPa range. Compared with a reference commercial sensor in deep sea experiment, the test pressure sensors exhibit minor error, excellent similarity and coherence. This numerical method provides a new research direction for environmental self-adaptive sensor. It can be emphasised that this sensor will have a good application prospect in unattended long-term ocean observation system.

中文翻译：

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船用高精度压阻式压力传感器的温度特性及补偿算法

用于海洋水文测量的压力传感器是深海探测、海啸预报和海洋工程的重要设备。硅压阻传感器技术工艺成熟，生产成本低，广泛应用于工业压力测量领域。然而，其温度效应会导致不可忽略的动态误差，不能满足深海环境的要求。提出了一种基于应力杯结构的蓝宝石上硅压力传感器。由于温度漂移，输出电压值在 -6∼50°C 范围内显示出很大的偏差。为了最大限度地减少这种温度影响，提出了一种温度补偿算法，以在满量程 60 MPa 范围内实现 0.03% 的精度。与深海实验中的参考商用传感器相比，测试压力传感器表现出较小的误差、出色的相似性和一致性。该数值方法为环境自适应传感器提供了一个新的研究方向。需要强调的是，该传感器在无人值守的长期海洋观测系统中将具有良好的应用前景。