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Investigation of E–H mode transition in magnetic-pole-enhanced inductively coupled neon–argon mixture plasma
Plasma Science and Technology ( IF 1.7 ) Pub Date : 2020-05-04 , DOI: 10.1088/2058-6272/ab785e
Zahid Iqbal KHATTAK 1 , Abdul Waheed KHAN 2 , Faiq JAN 3 , Muhammad SHAFIQ 1
Affiliation  

In this paper, E–H mode transition in magnetic-pole-enhanced inductively coupled neon–argon mixture plasma is investigated in terms of fundamental plasma parameters as a function of argon fraction (0%–100%), operating pressure (1 Pa, 5 Pa, 10 Pa and 50 Pa), and radio frequency (RF) power (5–100 W). An RF compensated Langmuir probe and optical emission spectroscopy are used for the diagnostics of the plasma under study. Owing to the lower ionization potential and higher collision cross-section of argon, when its fraction in the discharge is increased, the mode transition occurs at lower RF power; i.e. for 0% argon and 1 Pa pressure, the threshold power of the E–H mode transition is 65 W, which reduces to 20 W when the argon fraction is increased. The electron density increases with the argon fraction at a fixed pressure, whereas the temperature decreases with the argon fraction. The relaxation length of the low-energy electrons increases, and decreases for high-energy electrons w...

中文翻译:

磁极增强的电感耦合氖氩混合物等离子体中E–H模式转变的研究

在本文中,研究了磁极增强的电感耦合氖-氩混合物等离子体中的E–H模式转变,其基本等离子体参数与氩分数(0%–100%),工作压力(1 Pa, 5 Pa,10 Pa和50 Pa)以及射频(RF)功率(5–100 W)。RF补偿的Langmuir探针和光发射光谱用于诊断所研究的血浆。由于较低的电离势和较高的氩气碰撞截面,当其在放电中的比例增加时,模式转换会在较低的RF功率下发生;例如,对于0%的氩气和1 Pa的压力,E–H模式转变的阈值功率为65 W,当氩气含量增加时,该阈值功率降低至20W。在一定压力下,电子密度随氩分数的增加而增加,而温度随氩气分数的降低而降低。低能电子的弛豫长度增加,而高能电子的弛豫长度减小。
更新日期:2020-05-04
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