Abstract During the manufacture and processing of products, flatness is an important indicator of product quality. At present, flatness detection methods can be classified into contact and non-contact methods. Contact detection requires mutual contact with the test object, so the detection efficiency is low and it is easy to cause damage to the product. In the non-contact detection method, the accuracy of the microscope detection is very high, but the detection area is small and the cost is very high. Visual detection based on light scattering has high requirements for jitter and light, and strong jitter or light directly affects the detection results. The traditional ultrasonic ranging sensor requires the cooperation of the transmitting end and the receiving end, and has higher requirements on the ambient temperature. We found that when an ultrasonic array was used to generate strong ultrasound, the sound waves are reflected on the surface of the object and act on the polystyrene beads. We succeeded in detecting the flatness by comparing the speed difference of polystyrene ball at different positions on the surface of the product to be checked. This method may be applied to places where non-contact detection is required.

中文翻译：

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一种多发射器超声波平面度检测装置

摘要 在产品的制造和加工过程中，平整度是产品质量的重要指标。目前，平整度检测方法可分为接触式和非接触式两种。接触检测需要与被测物相互接触，检测效率低，容易对产品造成损坏。在非接触式检测方式中，显微镜检测的精度很高，但检测面积小，成本很高。基于光散射的视觉检测对抖动和光线要求较高，强抖动或光线直接影响检测结果。传统的超声波测距传感器需要发射端和接收端的配合，对环境温度有更高的要求。我们发现，当使用超声波阵列产生强超声波时，声波在物体表面反射并作用于聚苯乙烯珠。通过比较聚苯乙烯球在被检产品表面不同位置的速度差异，我们成功地检测到了平整度。这种方法可以应用于需要非接触检测的地方。