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Surface and mechanical analysis of metallized poly(dimethylsiloxane) gel for varifocal micromirrors
Surface and Interface Analysis ( IF 1.7 ) Pub Date : 2020-04-26 , DOI: 10.1002/sia.6791
Markus Franke 1 , Irma Slowik 2 , Enrico Langer 1 , Karl Leo 2 , Andreas Richter 1
Affiliation  

Varifocal micromirrors are alternative and miniaturized mirror systems that are used for imaging procedures in biomedical diagnostics, mirror‐based tunable lenses, or the correction of spherical aberration. In this study, we demonstrate a new concept for focal length variation by electrostatic mirror deformation of a compact and integrated electroactive polymer actuator based on metallized poly(dimethylsiloxane) (PDMS) gel thin films. The varifocal micromirrors have a lateral size of 70 × 70 μm2 and are capable of deforming in either convex or concave direction, depending on a defined surface treatment by O2‐plasma or UV/ozone of the PDMS prior to metallization by physical vapor deposition (PVD). Surface and interface analysis by wetting experiments, sputter depth‐profiling X‐ray photoelectron spectroscopy (XPS) combined with scanning electron microscopy (SEM) on cross‐sections processed with focused ion beam (FIB) as well as polymer and metal surfaces are used to understand and to improve the metal film growth and quality with respect to high reflectivity and conductivity. In addition to the high quality of the metallic mirror layer, the mirror displacement is important and inevitably depends on the gel stiffness of the actuator. Therefore, we investigate the gel mechanics and the performance of the actuator with rheology, confocal microscopy, and image formation on the electrically deformed mirrors. Our concept of varifocal micromirrors offers a wide range of applications for tunable mirror‐based optics due to their simple and compact design.

中文翻译:

用于变焦微镜的金属化聚二甲基硅氧烷凝胶的表面和力学分析

变种微镜是替代的微型镜系统,用于生物医学诊断中的成像程序,基于镜的可调透镜或球差校正。在这项研究中,我们展示了一种基于金属化聚二甲基硅氧烷(PDMS)凝胶薄膜的紧凑型集成电活性聚合物致动器的静电镜变形引起的焦距变化的新概念。变焦距微镜具有70×70微米的横向尺寸2和能够变形在任一凸部或凹方向,取决于所定义的表面处理被O 2在通过物理气相沉积(PVD)进行金属化之前,PDMS的等离子或UV /臭氧。通过润湿实验,溅射深度剖析X射线光电子能谱(XPS)结合扫描电子显微镜(SEM)对经过聚焦离子束(FIB)处理的横截面以及聚合物和金属表面的表面和界面进行分析了解并改善金属膜在高反射率和导电率方面的生长和质量。除了金属镜面层的高质量外,镜面位移也很重要,并且不可避免地取决于致动器的凝胶刚度。因此,我们通过流变学,共聚焦显微镜和电变形镜上的图像形成来研究凝胶力学和致动器的性能。
更新日期:2020-04-26
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