当前位置: X-MOL 学术Microsyst. Technol. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Simulation, mathematical modeling, fabrication and experimental analysis of piezoelectric acoustic sensor for energy harvesting applications
Microsystem Technologies ( IF 2.1 ) Pub Date : 2019-12-03 , DOI: 10.1007/s00542-019-04702-x
Vasudha Hegde , Siva S. Yellampalli , H. M. Ravikumar

In this paper, an acoustic sensor having ZnO based circular diaphragm sandwiched between two aluminum electrodes as the key element that can find applications in energy harvesting from acoustic sources has been designed, modeled, simulated, fabricated and tested. The ZnO layer is RF sputtered on Silicon substrate and a cavity has been formed by back etching the substrate. The dimensions of the structure are chosen such that the natural frequency of the structure closely matches with that of source frequency to get maximum output voltage due to resonance. The structure is mathematically modeled by Lumped Element Model method and simulated with Finite Element Model method. The experimental results indicate approximately 40 mV output voltage (Open circuit) at 140 db and the natural frequency in the range 11–12 kHz which is in close approximation with the results in mathematical model and simulated structure.



中文翻译:

用于能量收集应用的压电声传感器的仿真,数学建模,制造和实验分析

在本文中,已经设计,建模,模拟,制作和测试了一种声传感器,该声传感器具有夹在两个铝电极之间的,基于ZnO的圆形膜片,是可以在声源能量收集中找到应用的关键元素。ZnO层被RF溅射在硅衬底上,并且已经通过对衬底进行反刻蚀形成了空腔。选择结构的尺寸,以使结构的固有频率与源频率的固有频率紧密匹配,从而由于共振而获得最大输出电压。通过集总单元模型方法对结构进行数学建模,并通过有限元模型方法进行模拟。

更新日期:2019-12-03
down
wechat
bug