Large-pressure-range, large-sensing-distance evanescent-mode resonator wireless passive pressure sensors were fabricated from silicon carbonitride polymer-derived ceramic (PDC-SiCN) films enhanced by the polymer-infiltration-pyrolysis (PIP) process. The properties of PIP enhanced PDC films ensure a large pressure range for the sensor. To increase the sensing distance between the interrogation antenna and the sensor, the size or position of the resonator and slot antenna were optimized by High Frequency Structure Simulator simulations. The experimental results show that the resonant microwave signal can be wirelessly detected at distances up to 30 mm. The pressure sensor has a large pressure range (0–850 kPa) and high pressure sensitivity (211.8 kHz kPa −1 ) in pressure environments at room temperature.

中文翻译：

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基于聚合物渗透热解增强聚合物衍生陶瓷膜的大压力范围，大传感距离无线无源压力传感器

由碳氮化硅聚合物衍生的陶瓷（PDC-SiCN）薄膜通过聚合物渗透热解（PIP）工艺增强制造了大压力范围，大传感距离的e逝模式谐振器无线无源压力传感器。PIP增强的PDC膜的特性确保了传感器的大压力范围。为了增加询问天线与传感器之间的感应距离，通过高频结构仿真器仿真优化了谐振器和缝隙天线的尺寸或位置。实验结果表明，可以在长达30 mm的距离内无线检测到共振微波信号。在室温下的压力环境中，压力传感器具有较大的压力范围（0–850 kPa）和较高的压力灵敏度（211.8 kHz kPa -1）。