This paper describes initial experimental results from an extreme ultraviolet (EUV) radiation-pulsed atom probe microscope. Femtosecond-pulsed coherent EUV radiation of 29.6 nm wavelength (41.85 eV photon energy), obtained through high harmonic generation in an Ar-filled hollow capillary waveguide, successfully triggered controlled field ion emission from the apex of amorphous SiO2 specimens. The calculated composition is stoichiometric within the error of the measurement and effectively invariant of the specimen base temperature in the range of 25 K to 150 K. Photon energies available in the EUV band are significantly higher than those currently used in the state-of-the-art near-ultraviolet laser-pulsed atom probe, which enables the possibility of additional ionization and desorption pathways. Pulsed coherent EUV light is a new and potential alternative to near-ultraviolet radiation for atom probe tomography.

中文翻译：

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飞秒脉冲相干极紫外光触发的原子探针显微镜中的场离子发射

本文介绍了极紫外 (EUV) 辐射脉冲原子探针显微镜的初步实验结果。通过在充满 Ar 的空心毛细管波导中产生高次谐波获得的 29.6 nm 波长（41.85 eV 光子能量）的飞秒脉冲相干 EUV 辐射成功地触发了来自非晶 SiO 顶点的受控场离子发射2标本。计算出的成分在测量误差范围内是化学计量的，并且在 25 K 至 150 K 范围内有效地保持样品基础温度不变。EUV 波段中可用的光子能量明显高于目前在最新技术中使用的光子能量。 -艺术近紫外激光脉冲原子探针，可实现额外的电离和解吸途径。脉冲相干 EUV 光是用于原子探针断层扫描的近紫外辐射的一种新的潜在替代方案。