Hydrogenated amorphous carbon (a‐C:H) films consisting of a top a‐C:H layer, a gradient transient a‐C:H:Ti layer, and a bottom Ti layer were irradiated by 1.1‐MeV C⁺ ions, resulting in a maximum displacement damage of 1.0 dpa and a projected range inside the Ti layer. Time‐of‐flight secondary ion mass spectrometry, electron energy loss spectroscopy, high‐resolution transmission electron microscopy, and X‐ray photoelectron spectroscopy analyses were performed to investigate the compositional and structural transitions of a‐C:H films after self‐ion irradiation. The results revealed that C⁺ ions passing through the top a‐C:H layer induced C–H fracture and hydrogen diffusion in this layer and then resulted in atomic intermixing in the multilayered adhesion interlayer. After local energy deposition of C⁺ ions, the initial sharp interfaces in the a‐C:H:Ti layer became ambiguous due to interfacial mixing. In addition, titanium carbides formed in the Ti layer, with a gradual phase transition from TiCx to TiC with a diffusion depth of 200 nm. The broken compositional gradients of the adhesion interlayer resulted in a significant decrease in the adhesion strength of the films, which eventually resulted in degraded antiwear properties of the irradiated film in dry sliding tribotests.

中文翻译：

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在粘附中间层深度处对氢化非晶碳膜进行自离子辐照：辐射诱导的原子互混和膜性能下降

用1.1-MeV C ⁺离子辐照氢化非晶碳（a-C：H）膜，该膜由a-C：H顶层，a-C：H：Ti梯度瞬变层和Ti底层构成，最大位移损伤为1.0 dpa，Ti层内部的投影范围更大。飞行时间二次离子质谱，电子能量损失光谱，高分辨率透射电子显微镜和X射线光电子能谱分析用于研究自离子辐照后a-C：H膜的组成和结构转变。结果表明，C ⁺离子穿过顶层a：C：H层会导致该层破裂以及氢在该层中扩散，然后导致原子在多层粘合夹层中相互混合。在C ⁺离子局部能量沉积之后，由于界面混合，a-C：H：Ti层中最初的尖锐界面变得模糊。另外，在Ti层中形成的碳化钛具有从TiC x到TiC的逐渐的相变，扩散深度为200nm。破裂的粘合夹层组成梯度导致薄膜的粘附强度显着降低，最终导致在干式滑动摩擦试验中被辐照的薄膜的抗磨性能下降。