Regular nanoscopic ripple and dot patterns are fabricated on poly‐crystalline titanium samples by irradiation with 1.5 keV argon ions at normal incidence. The morphology of the nanostructures is investigated by scanning electron microscopy and scanning force microscopy. The ripple structures exhibit a saw‐tooth cross‐section profile. Electron backscatter diffraction experiments are performed to analyze the local grain structure. The study suggests a distinct correlation of the nanostructure morphology to the crystallographic orientation of the titanium surface.

中文翻译：

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低能离子束腐蚀对钛表面的取向依赖性纳米结构

通过以垂直入射1.5 keV氩离子辐照在多晶钛样品上制成规则的纳米级波纹和点图案。通过扫描电子显微镜和扫描力显微镜研究纳米结构的形态。波纹结构呈现出锯齿形的横截面轮廓。进行电子背散射衍射实验以分析局部晶粒结构。研究表明，纳米结构形态与钛表面的晶体取向有着明显的相关性。