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Unit-Cell Deformation under Discontinuous Deposition of Barium–Strontium Niobate Films
Technical Physics Letters ( IF 0.6 ) Pub Date : 2020-01-09 , DOI: 10.1134/s1063785019120149
D. V. Stryukov , A. V. Pavlenko

Abstract

Epitaxial Sr0.5Ba0.5Nb2O6/MgO thin films with layers of differing thickness (but with identical total thickness) have been prepared by radio-frequency magnetron sputtering with application of discontinuous deposition technology. It is established that a decrease in the layer thickness intensifies the unit-cell deformation, which is retained if the thickness of subsequent layers does not exceed the critical value.


中文翻译:

铌酸锶钡薄膜不连续沉积下的晶胞变形

摘要

采用不连续沉积技术,通过射频磁控溅射制备了具有不同厚度(但总厚度相同)的外延薄膜Sr 0.5 Ba 0.5 Nb 2 O 6 / MgO。可以确定的是,层厚度的减小加剧了晶胞变形,如果随后的层的厚度不超过临界值,则晶胞变形得以保留。
更新日期:2020-01-09
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