Undoped and aluminum-doped ZnO (AZO) thin films were prepared by the sol–gel process. Single thin layers were synthesized at room temperature by spin coating on glass and silicon substrates. The gel was laser irradiated (530 nm, 10 W) during the spinning process. We used Fourier-transform infrared (FTIR) spectroscopy and scanning electron microscopy (SEM) to characterize the chemical bonding configuration and surface morphology. UV–Vis spectroscopy was used to find optical transmittance, and energy-dispersive X-ray spectroscopy (EDS) was used to measure the surface chemical composition. Results of the EDS and FTIR analyses confirmed the successful preparation of ZnO and AZO through laser-assisted spin coating. SEM images showed that surface morphology and porosity were affected by the doping concentration. Al-doped samples showed high transmittance and possessed optical band gap values between 3.26 and 3.34 eV without laser irradiation and 3.3 – 3.341 eV with laser irradiation. Laser irradiation improved the structure and optical properties of the films.

中文翻译：

---

铝掺杂ZnO薄膜的激光辅助旋涂

通过溶胶-凝胶工艺制备了未掺杂和铝掺杂的ZnO（AZO）薄膜。在室温下通过旋涂在玻璃和硅基板上合成单个薄层。在纺丝过程中将凝胶激光照射（530 nm，10 W）。我们使用傅立叶变换红外（FTIR）光谱和扫描电子显微镜（SEM）来表征化学键合构型和表面形态。紫外-可见光谱用于发现光透射率和能量色散X射线光谱法（EDS）用于测量表面化学成分。EDS和FTIR分析的结果证实了通过激光辅助旋涂成功制备了ZnO和AZO。SEM图像表明，表面形态和孔隙率受掺杂浓度的影响。掺铝样品显示出高透射率，在未照射激光的情况下其光学带隙值在3.26和3.34 eV之间，在照射激光的情况下其光学带隙值在3.3 – 3.341 eV之间。激光辐照改善了膜的结构和光学性能。