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Round robin comparison study on the form measurement of optical freeform surfaces
Journal of the European Optical Society-Rapid Publications ( IF 1.5 ) Pub Date : 2020-01-08 , DOI: 10.1186/s41476-019-0124-1
Ines Fortmeier , Reyko Schachtschneider , Vit Ledl , Ondrej Matousek , Jens Siepmann , Antonia Harsch , Rolf Beisswanger , Youichi Bitou , Yohan Kondo , Michael Schulz , Clemens Elster

A round robin comparison of freeform form measurements was carried out by the project partners and stakeholders of a European metrology research project. Altogether six measuring instruments were considered: five different (pointwise and areal) optical devices and one tactile device. Three optical freeform surfaces were used for the comparison measurements, where two specimens were measured by five instruments and one specimen by four instruments. In this paper, the evaluation methods and results of this round robin are presented for the three freeform surfaces made from a temperature-stable material, Super Invar ®. The freeforms had diameters of 40 mm, 50 mm and 100 mm and best-fit radii of 39.75 mm (convex), 40.9 mm (convex) and 423.5 mm (concave). For comparison, the bilateral pointwise differences between the available measurements were calculated. The root-mean-square values of these differences ranged from 15 nm to 110 nm (neglecting spherical contributions) and provided an insight into the status of typical freeform measurement capabilities for optical surfaces.

中文翻译:

光学自由曲面表面形状测量的循环比较研究

欧洲计量研究项目的项目合作伙伴和利益相关者对自由形式形式的测量进行了循环比较。总共考虑了六种测量仪器:五种不同的(点式和面式)光学设备和一种触觉设备。使用三个光学自由曲面进行比较测量,其中用五个仪器测量两个样本,用四个仪器测量一个样本。在本文中,针对由温度稳定材料Super Invar®制成的三个自由曲面,提出了这种循环法的评估方法和结果。自由形状的直径为40 mm,50 mm和100 mm,最佳拟合半径为39.75 mm(凸),40.9 mm(凸)和423.5 mm(凹)。为了比较,计算可用测量之间的双边点向差异。这些差异的均方根值在15 nm至110 nm(忽略球形影响)的范围内,从而洞察了光学表面的典型自由形式测量功能的状态。
更新日期:2020-04-23
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