The authors report on the rapid fabrication of an axicon array, consisting of 37 individual axicons in a hexagonal arrangement, made of fused silica by an all laser-based manufacturing method within only 23 min. Therefore, a two-step process is used, first to ablate the silica substrate in a layer-by-layer process, generating the predefined geometry of the axicon array with a femtosecond laser, and second to polish the rough optical element by applying a CO 2 laser to reach smooth surfaces. Here, the roughness is reduced from 0.36 μm before to 48 nm after the polishing step, thus reaching optical quality. The finalized axicon array was placed into a femtosecond laser machine for a detailed evaluation of the resulting quasi-Bessel beams. It is found that all sub-beams exhibit the typical zeroth-order Bessel beam intensity distribution, in turn confirming that the manufacturing process used here is well suitable for the fabrication of complex optical geometries. Cross sections of the sub-beams in both x- and y-directions show an almost identical intensity profile, indicating the high contour accuracy of the axicon array. The diameter of the quasi-Bessel beams is measured to be in the range of 9.4–10.3 μm [full width at half-maximum (FWHM)], and the Bessel range in propagation direction amounts to between 8.0 mm and 8.5 mm (FWHM).The authors report on the rapid fabrication of an axicon array, consisting of 37 individual axicons in a hexagonal arrangement, made of fused silica by an all laser-based manufacturing method within only 23 min. Therefore, a two-step process is used, first to ablate the silica substrate in a layer-by-layer process, generating the predefined geometry of the axicon array with a femtosecond laser, and second to polish the rough optical element by applying a CO 2 laser to reach smooth surfaces. Here, the roughness is reduced from 0.36 μm before to 48 nm after the polishing step, thus reaching optical quality. The finalized axicon array was placed into a femtosecond laser machine for a detailed evaluation of the resulting quasi-Bessel beams. It is found that all sub-beams exhibit the typical zeroth-order Bessel beam intensity distribution, in turn confirming that the manufacturing process used here is well suitable for the fabrication of complex optical geometries. Cross sections of the sub-beams in both...

中文翻译：

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通过全激光制造技术快速制造精密玻璃轴棱镜阵列

作者报告了一个轴锥阵列的快速制造，该阵列由六边形排列的 37 个单独的轴锥组成，由熔融石英在仅 23 分钟内通过全激光制造方法制成。因此，使用两步工艺，首先在逐层工艺中烧蚀二氧化硅衬底，用飞秒激光生成轴棱镜阵列的预定义几何形状，然后通过应用 CO 抛光粗糙的光学元件2 激光达到光滑的表面。在此，粗糙度从抛光步骤之前的 0.36 μm 降低到抛光步骤之后的 48 nm，从而达到光学质量。最终的轴棱锥阵列被放置在飞秒激光机中，用于对产生的准贝塞尔光束进行详细评估。发现所有子光束都表现出典型的零阶贝塞尔光束强度分布，反过来证实这里使用的制造工艺非常适合制造复杂的光学几何形状。子光束在 x 和 y 方向上的横截面显示出几乎相同的强度分布，表明轴棱镜阵列的轮廓精度很高。准贝塞尔光束的直径经测量在 9.4–10.3 μm [半高全宽 (FWHM)] 范围内，传播方向上的贝塞尔范围介于 8.0 mm 和 8.5 mm (FWHM) 之间. 作者报告了一个轴锥阵列的快速制造，该阵列由六边形排列的 37 个单独轴锥组成，由熔融石英通过全激光制造方法在 23 分钟内完成。因此，采用两步工艺，首先在逐层工艺中烧蚀二氧化硅基板，用飞秒激光生成轴棱锥阵列的预定义几何形状，然后通过应用 CO 2 激光抛光粗糙的光学元件以达到光滑的表面。在此，粗糙度从抛光步骤之前的 0.36 μm 降低到抛光步骤之后的 48 nm，从而达到光学质量。最终的轴棱锥阵列被放置在飞秒激光机中，用于对产生的准贝塞尔光束进行详细评估。发现所有子光束都表现出典型的零阶贝塞尔光束强度分布，进而证实这里使用的制造工艺非常适合复杂光学几何形状的制造。两个子梁的横截面... 粗糙度从抛光前的 0.36 μm 降低到抛光后的 48 nm，从而达到光学质量。最终的轴棱锥阵列被放置在飞秒激光机中，用于对产生的准贝塞尔光束进行详细评估。发现所有子光束都表现出典型的零阶贝塞尔光束强度分布，进而证实这里使用的制造工艺非常适合制造复杂的光学几何形状。两个子梁的横截面... 粗糙度从抛光前的 0.36 μm 降低到抛光后的 48 nm，从而达到光学质量。最终的轴棱锥阵列被放置在飞秒激光机中，用于对产生的准贝塞尔光束进行详细评估。发现所有子光束都表现出典型的零阶贝塞尔光束强度分布，进而证实这里使用的制造工艺非常适合复杂光学几何形状的制造。两个子梁的横截面... 反过来证实这里使用的制造工艺非常适合制造复杂的光学几何形状。两个子梁的横截面... 反过来证实这里使用的制造工艺非常适合制造复杂的光学几何形状。两个子梁的横截面...