A mathematical model of a high-sensitivity pressure sensor with a novel electrical circuit utilizing a piezosensitive transistor differential amplifier with negative feedback loop is presented. Circuits utilizing differential transistor amplifiers based on vertical n-p-n and lateral p-n-p transistors are analyzed and optimized for sensitivity to pressure and stability of output signal in operating temperature range. Parameters of fabrication process necessary for modeling of I–V characteristics of transistors are discussed. The results of the model are sufficiently close to the experimental data.

中文翻译：

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具有片上差分晶体管放大器的高灵敏度压力传感器的开发

提出了具有新型电路的高灵敏度压力传感器的数学模型，该电路采用具有负反馈回路的压敏晶体管差分放大器。对基于垂直npn和横向pnp晶体管的利用差分晶体管放大器的电路进行了分析和优化，以提高其在工作温度范围内对压力的敏感性和输出信号的稳定性。讨论了为晶体管的I–V特性建模所必需的制造工艺参数。模型的结果与实验数据足够接近。