In an atomic force microscope (AFM) system, the measurement accuracy in the scan images is determined by the displacement accuracy of piezo scanner. The hysteresis model of piezo scanner displacement is complex and difficult to correct, which is the main reason why the output displacement of the piezo scanner does not have high precision. In this study, an image pixel hysteresis model of the piezo scanner displacement in the AFM system was established. An AFM was used to scan a two-dimensional (2D) grating in the 0 ° and 90 ° directions and a polynomial fitting method was employed to obtain the image pixel hysteresis model parameters of the piezo scanner displacement in the X-direction and Y-direction. The image pixel hysteresis model was applied to correct the AFM scan image of regular octagons. The results showed that the relative measurement error in the X-direction was decreased from 12.47% to 0.52% after the correction and that in the Y-direction decreased from 28.57% to 0.35%. The image pixel hysteresis model can be applied in the post-processing software of a commercial AFM system. The model solves the hysteresis problem of the AFM system and improves the measuring accuracy of AFM in 2 degrees of freedom (2 DOF).

中文翻译：

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原子力显微镜图像像素滞后的建模与校正

在原子力显微镜 (AFM) 系统中，扫描图像中的测量精度由压电扫描仪的位移精度决定。压电扫描仪位移滞后模型复杂且难以修正，这是压电扫描仪输出位移精度不高的主要原因。在这项研究中，建立了 AFM 系统中压电扫描仪位移的图像像素滞后模型。使用AFM在0°和90°方向扫描二维（2D）光栅，并采用多项式拟合方法获得X方向和Y方向压电扫描仪位移的图像像素滞后模型参数方向。应用图像像素滞后模型校正正八边形的AFM扫描图像。结果表明，校正后X方向的相对测量误差从12.47%降低到0.52%，Y方向的相对测量误差从28.57%降低到0.35%。图像像素迟滞模型可应用于商用 AFM 系统的后处理软件。该模型解决了 AFM 系统的滞后问题，提高了 AFM 在 2 个自由度（2 DOF）的测量精度。