The use of areal characterization of surface texture with high accuracy in a quality control process requires reliability. Therefore, regular inspection of the measurement systems is needed. Important metrological features of a measurement system in dimensional metrology are the amplification factor and linearity.

This paper presents a simple method for characterizing the axial scanning system of areal topography measuring instruments with little expense and effort, well suited for industrial routine calibration in the field. The method is based on employing a single material measure with a range of step heights. It is shown that the amplification factor and linearity deviations can be determined and adjusted for large axial measurement ranges.

在质量控制过程中以高精度使用表面纹理的区域特征需要可靠性。因此，需要定期检查测量系统。尺寸计量学中测量系统的重要计量学特征是放大系数和线性度。

本文提出了一种简单的方法来表征平面形貌测量仪器的轴向扫描系统，而费用和工作量却很少，非常适合于该领域的工业常规校准。该方法基于采用具有一定阶梯高度范围的单一材料测量。结果表明，对于较大的轴向测量范围，可以确定和调整放大系数和线性偏差。