当前位置: X-MOL 学术J. Micromech. Microeng. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Rapid fabricating process of flexible PDMS- film with array micro round holes by blowing organic net framework
Journal of Micromechanics and Microengineering ( IF 2.3 ) Pub Date : 2020-04-20 , DOI: 10.1088/1361-6439/ab7c7f
Junjie Li 1, 2 , Hao Tong 1, 2 , Yubin Pu 2 , Yong Li 1, 2 , Seonghee Namb 2
Affiliation  

Flexible organic films with through-holes array count for many fields, such as flexible MEMS structures and electrochemical machining (ECM) masks. Polydimethylsiloxane (PDMS) is a material often used as flexible films due to the advantages of chemically inert, transparent, and well-combined with silicon-based materials. Generally, the flexible films with through-holes were fabricated by the pattering dies based on MEMS processes. However, the die area is very limited by the wafer size in the photolithography process although the holes can be accurate. A PDMS gas-blowing process is capable of fabricating flexible films with arrayed micro holes in a rapid and low-cost way, but the process is lacking theoretical foundations and parametric rules. It is hard to realize a controllable, repeatable and stable fabricating process. In this research, we established physical models to analyze the effect of key parameters and constraint conditions on the PDMS gas-blowing process. Experiments...

中文翻译:

吹制有机网架快速制造具有阵列微圆孔的柔性PDMS-薄膜

具有通孔阵列的柔性有机膜在许多领域都有应用,例如柔性MEMS结构和电化学加工(ECM)掩模。聚二甲基硅氧烷(PDMS)由于化学惰性,透明性以及与硅基材料的良好结合而成为经常用作柔性薄膜的材料。通常,具有通孔的柔性膜是通过基于MEMS工艺的图案模制造的。然而,尽管孔可以是精确的,但是在光刻工艺中管芯面积受到晶片尺寸的很大限制。PDMS吹气工艺能够以快速且低成本的方式制造具有阵列微孔的柔性膜,但该工艺缺乏理论基础和参数规则。难以实现可控,可重复和稳定的制造过程。在这项研究中 我们建立了物理模型,以分析关键参数和约束条件对PDMS吹气过程的影响。实验...
更新日期:2020-04-22
down
wechat
bug