In this work, we introduce a roll-to-roll system that can continuously print three-dimensional (3D) periodic nanostructures over large areas. This approach is based on Langmuir-Blodgett assembly of colloidal nanospheres, which diffract normal incident light to create a complex intensity pattern for near-field nanolithography. The geometry of the 3D nanostructure is defined by the Talbot effect and can be precisely designed by tuning the ratio of the nanosphere diameter to the exposure wavelength. Using this system, we have demonstrated patterning of 3D photonic crystals with a 500 nm period on a 50 × 200 mm² flexible substrate, with a system throughput of 3 mm/s. The patterning yield is quantitatively analyzed by an automated electron beam inspection method, demonstrating long-term repeatability of an up to 88% yield over a 4-month period. The inspection method can also be employed to examine pattern uniformity, achieving an average yield of up to 78.6% over full substrate areas. The proposed patterning method is highly versatile and scalable as a nanomanufacturing platform and can find application in nanophotonics, nanoarchitected materials, and multifunctional nanostructures.

在这项工作中，我们引入了一种卷对卷系统，可以在大面积上连续打印三维 (3D) 周期性纳米结构。这种方法基于胶体纳米球的 Langmuir-Blodgett 组装，它衍射法向入射光以创建用于近场纳米光刻的复杂强度图案。3D 纳米结构的几何形状由 Talbot 效应定义，可以通过调整纳米球直径与曝光波长的比率来精确设计。使用该系统，我们已经展示了 50 × 200 mm ²上 500 nm 周期的 3D 光子晶体的图案化柔性基板，系统吞吐量为 3 mm/s。通过自动电子束检测方法对图案化良率进行定量分析，证明了在 4 个月内高达 88% 的良率的长期重复性。该检测方法还可用于检查图案均匀性，在整个基板区域内实现高达 78.6% 的平均良率。所提出的图案化方法作为纳米制造平台具有高度通用性和可扩展性，可以在纳米光子学、纳米结构材料和多功能纳米结构中找到应用。