This study analyses the transfer path of electrical feed-through noise in the electromechanical amplitude modulation detection circuit of a micro-electro-mechanical system vibrating gyroscope. By considering the feed-through, circuit and mechanical thermal noises, a new noise model in the force-to-rebalance closed-loop detection is constructed, and the expression of the noise-equivalent rotation rate spectrum is given. In addition, the influences of factors such as circuit gain, feedback coefficient and frequency split on the contribution of noise are analysed. The analysis shows that the back-end injection noise is the main factor affecting angle random walk (ARW) for high Q-value gyroscopes. Through actual measurements, it was found that the feed-through noise at the carrier frequency of the feedback circuit was the main source of the back-end noise. After noise optimization, the ARW of the detection output decreased from 0.148 ##IMG## {$^{\circ}\!\!/\sqrt{\mat...}

中文翻译：

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MEMS陀螺力力平衡闭环检测下考虑电馈通的噪声模型

本研究分析了微机电系统振动陀螺仪的机电调幅检测电路中的电馈通噪声的传递路径。通过考虑馈通噪声，电路噪声和机械热噪声，构造了力-再平衡闭环检测中的新噪声模型，并给出了等效噪声转速谱的表达式。此外，分析了诸如电路增益，反馈系数和频率分割等因素对噪声贡献的影响。分析表明，后端注入噪声是影响高Q值陀螺仪角度随机游走（ARW）的主要因素。通过实际测量，发现反馈电路的载波频率处的馈通噪声是后端噪声的主要来源。经过噪声优化后，检测输出的ARW从0.148 ## IMG ## {$ ^ {\ circ} \！\！/ \ sqrt {\ mat ...}