Abstract We report on the nonlinear wake-up behavior against the external electric field cycling in the ferroelectric Hf0.7Zr0.3O2 thin film. Two distinct scaling regimes during the increase of the remnant polarization with different activation energies were observed in TiN/Hf0.7Zr0.3O2/TiN cells. The transmission electron microscopy revealed the structural phase transition from the monoclinic structure to the orthorhombic structure of the Hf0.7Zr0.3O2 film after the wake-up behavior. During the phase change, as the remnant polarization enhanced, the dielectric constant of the Hf0.7Zr0.3O2 film increased with the external field cycling. The temperature dependence of the wake-up behavior revealed that each estimated activation energies for the early and later enhancement of the remnant polarization are 1.12 eV and 0.73 eV, respectively. First principle calculations show that the oxygen vacancies can reduce the activation energy barrier for the structural phase transition.

中文翻译：

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Hf0.7Zr0.3O2薄膜非线性唤醒行为的动态分析

摘要 我们报告了铁电 Hf0.7Zr0.3O2 薄膜中外部电场循环的非线性唤醒行为。在 TiN/Hf0.7Zr0.3O2/TiN 电池中观察到在具有不同活化能的残余极化增加期间两种不同的缩放机制。透射电子显微镜揭示了 Hf0.7Zr0.3O2 膜在唤醒行为后从单斜结构到正交结构的结构相变。在相变过程中，随着剩余极化增强，Hf0.7Zr0.3O2 薄膜的介电常数随着外场循环而增加。唤醒行为的温度依赖性表明，残余极化早期和晚期增强的每个估计激活能分别为 1.12 eV 和 0.73 eV。