This paper presents an enhanced microscopic vision-based approach supporting fast and high-precision measurement on planar motions of a multi-degree of freedom (DOF) compliant stage with sub-micrometer motion accuracy. The proposed method is based on an improved particle swarm optimization (PSO) algorithm, including two phases. First, an inverted pyramid structure is employed to divide the solution space into a top-level solution space, such that the expected solution can be quickly located into a smaller range from bottom to top. Then, the spacial three search step (S-TSS) algorithm is applied to achieve an accurate result. The effectiveness of the proposed method is evaluated on a three-DOF micro stage with translational and rotational motions, where comparative studies with existing results are also conducted. The experimental results demonstrate significant improvement on algorithm efficiency without sacrificing the measurement accuracy, which indicates good potential for visual servo control of such micro stages with the proposed approach.

中文翻译：

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柔性微型平台的平面运动测量：一种增强的显微视觉方法

本文提出了一种增强的基于显微视觉的方法，该方法支持对多自由度 (DOF) 兼容平台的平面运动进行快速和高精度测量，具有亚微米运动精度。所提出的方法基于改进的粒子群优化 (PSO) 算法，包括两个阶段。首先，采用倒金字塔结构将解空间划分为顶层解空间，使得期望解可以快速定位到从下到上的较小范围内。然后，应用空间三搜索步骤（S-TSS）算法来获得准确的结果。在具有平移和旋转运动的三自由度微型平台上评估了所提出方法的有效性，并与现有结果进行了比较研究。