Silicon-based lasers have played an important role in silicon-based optoelectronic integrated system. Recent studies demonstrated erbium silicate was an ideal candidate material for high performance silicon-based lasers in the telecom wavelength due to its high erbium concentrations. In previous works erbium silicate compounds led to high waveguide losses, the hybrid layers of erbium silicate and silicon nitride seem to be suitable to overcome high losses of previous designs with Er-based gain media waveguides. So a hybrid erbium silicate-silicon nitride waveguide laser has been proposed to make up for the loss problems of erbium silicate material, and to obtain high laser output power and high efficiency. Then, different cavity geometries, including ordinary strip-loaded DFB cavity with pump/signal resonant external cavity, have been discussed and optimized to further improve the laser performance. A 70 mW high-power laser with the maximum power conversion efficiency of 60% can be obtained in a 6.5 mm distributed feedback cavity length through developing the optimized signal external resonator cavity and grating reflector. Finally, the usability of this technology has been discussed as a potential input laser for silicon photonics. The results indicate the hybrid erbium silicate-silicon nitride waveguide lasers with high performance as potential candidates for future scale integrated silicon-based lasers application.

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一种高功率、高效率的混合硅基铒硅酸盐-氮化硅波导激光器

硅基激光器在硅基光电集成系统中发挥了重要作用。最近的研究表明，由于铒浓度高，硅酸铒是电信波长高性能硅基激光器的理想候选材料。在以前的工作中，硅酸铒化合物导致高波导损耗，硅酸铒和氮化硅的混合层似乎适合克服以前设计的基于 Er 的增益介质波导的高损耗。因此，为了弥补硅酸铒材料的损耗问题，获得高激光输出功率和高效率，提出了一种混合型硅酸铒-氮化硅波导激光器。然后，不同的腔体几何形状，包括带有泵浦/信号谐振外腔的普通带状加载 DFB 腔，已经讨论和优化以进一步提高激光器性能。通过开发优化的信号外谐振腔和光栅反射器，可以在6.5 mm的分布式反馈腔长内获得最大功率转换效率为60%的70 mW大功率激光器。最后，讨论了该技术作为硅光子学的潜在输入激光器的可用性。结果表明，具有高性能的混合铒硅酸盐-氮化硅波导激光器是未来规模集成硅基激光器应用的潜在候选者。通过开发优化的信号外部谐振腔和光栅反射器，5 mm 分布式反馈腔长度。最后，讨论了该技术作为硅光子学的潜在输入激光器的可用性。结果表明，具有高性能的混合铒硅酸盐-氮化硅波导激光器是未来规模集成硅基激光器应用的潜在候选者。通过开发优化的信号外部谐振腔和光栅反射器，5 mm 分布式反馈腔长度。最后，讨论了该技术作为硅光子学的潜在输入激光器的可用性。结果表明，具有高性能的混合铒硅酸盐-氮化硅波导激光器是未来规模集成硅基激光器应用的潜在候选者。