Abstract Microstructural properties of 10 mol% gadolinium doped ceria (CeO2) thin films that were deposited on quartz substrate at substrate temperature of 1023 K by using pulsed laser deposition with different oxygen partial pressures in the range of 50–200 mTorr. The influence of oxygen partial pressure on microstructural, morphological, optical and gas sensing characterization of the thin films was systematically studied. The microstructure of the thin films was investigated using X-ray diffraction, atomic force microscopy and Raman spectroscopy. Morphological studies have been carried out using scanning electron microscope. The experimental results confirmed that the films were polycrystalline in nature with cubic fluorite structure. Optical properties of the thin films were examined using UV–vis spectrophotometer. The optical band gap calculated from Tauc’s relation. Gas sensing characterization has been carried at different operating temperatures (room temperature to 523 K) for acetone gas. Response and recovery times of the sensor were calculated using transient response plot.

中文翻译：

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氧分压对脉冲激光沉积纳米结构 Gd 掺杂氧化铈薄膜的微观结构、光学和气敏特性的影响

摘要 10 mol% 钆掺杂二氧化铈 (CeO2) 薄膜的微观结构特性，该薄膜在 1023 K 的衬底温度下使用脉冲激光沉积在 50-200 mTorr 范围内的不同氧分压下沉积在石英衬底上。系统地研究了氧分压对薄膜微观结构、形态、光学和气敏特性的影响。使用X射线衍射，原子力显微镜和拉曼光谱研究薄膜的微观结构。已经使用扫描电子显微镜进行了形态学研究。实验结果证实该薄膜本质上是多晶的，具有立方萤石结构。使用紫外-可见分光光度计检查薄膜的光学性质。根据 Tauc 关系计算的光学带隙。已在不同的操作温度（室温至 523 K）下对丙酮气体进行了气体传感表征。使用瞬态响应图计算传感器的响应和恢复时间。