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Electron optical characterization of a graphene coated nickel electron source
Journal of Electron Spectroscopy and Related Phenomena ( IF 1.9 ) Pub Date : 2020-05-01 , DOI: 10.1016/j.elspec.2019.06.002
Xiuyuan Shao , Wei Kean Ang , Anjam Khursheed

Abstract Graphene coated nickel electron sources have been recently reported to have significant advantages over state-of-the-art conventional tungsten cold field emission sources for electron microscopy/lithography applications. In this article, noise characteristics and lifetime measurements of a graphene-coated point-cathode emitter are presented in a vacuum chamber with a base pressure of 2×10−9 Torr. The results show that the emitter is able to operate at a high current density (1 μA/sr) for 600 h without decay. The energy spread broadening at high emission current density due to mutual coulomb repulsion between the electron-electron interactions (the Boersch effect) was experimentally estimated, and found to increase with greater extraction voltages and decreasing tip sizes. These results provide data from which low energy beam applications can be developed for the cold field graphene coated nickel electron source.

中文翻译:

石墨烯涂层镍电子源的电子光学表征

摘要 最近有报道称,在电子显微镜/光刻应用中,石墨烯涂层镍电子源比最先进的传统钨冷场发射源具有显着优势。在本文中,石墨烯涂层点阴极发射器的噪声特性和寿命测量在具有 2×10-9 Torr 基本压力的真空室中进行介绍。结果表明,发射器能够在高电流密度 (1 μA/sr) 下工作 600 小时而不会衰减。由于电子 - 电子相互作用(Boersch 效应)之间的相互库仑排斥,能量扩展在高发射电流密度下扩大,通过实验估计,发现随着提取电压的增加和尖端尺寸的减小而增加。
更新日期:2020-05-01
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