Miniaturization of displacement sensors for nanoscale metrology is a key requirement in many applications such as accelerometry, mass sensing, and atomic force microscopy. While optics provides high resolution and bandwidth, integration of sensor readout is required to achieve low-cost, compact, and parallelizable devices. Here, we present a novel integrated opto-electro-mechanical device for displacement sensing that has sub-nanometer resolution. The proposed sensor is a micron-sized double-membrane photonic crystal cavity with integrated electro-optical readout, directly addressed via an on-chip waveguide. This sensor displays a noise floor down to $7\text{\hspace{0.17em}fm}/\sqrt{\mathrm{\text{Hz}}}$ and is suitable for the realization of integrated arrays.

中文翻译：

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用于纳米级位移传感的片上波导耦合光电系统

用于纳米级计量的位移传感器的小型化是诸如加速度计，质量感测和原子力显微镜等许多应用中的关键要求。虽然光学器件可提供高分辨率和带宽，但仍需要集成传感器读数以实现低成本，紧凑且可并行化的设备。在这里，我们提出了一种新颖的集成式光电机械设备，用于位移传感，具有亚纳米级的分辨率。拟议中的传感器是具有集成电光读数的微米级双膜光子晶体腔，可通过片上波导直接寻址。该传感器显示本底噪声$7\text{\hspace{0.17em}调频}/\sqrt{\mathrm{\text{赫兹}}}$ 并且适合于集成阵列的实现。