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Effects of oxygen pressure on PLD-grown Be and Cd co-substituted ZnO alloy films for ultraviolet photodetectors
Journal of Alloys and Compounds ( IF 6.2 ) Pub Date : 2020-08-01 , DOI: 10.1016/j.jallcom.2020.155032
Teng Zhang , Zhen Xu , Jian Chen , Mingkai Li , Yinmei Lu , Yunbin He

Abstract We report on the synthesis of Be and Cd co-substituted ZnO (BexCdyZn1−x−yO) quaternary alloy films on c-plane sapphire substrates by pulsed laser deposition. The results show that all deposited films exhibit single-phase wurtzite structure with a surface roughness less than 1.5 nm. By adjusting the O2 pressure during growth, the optical bandgap of the film is tuned from ∼3.3 to ∼3.52 eV. At 5 V bias, the BexCdyZn1-x-yO-based photodetector exhibits a remarkable photoresponse in the ultraviolet region with low dark current (∼16.2 pA) and high detectivity (9.31 × 1010 Jones). The rise and decay times of the photodetectors based on BexCdyZn1-x-yO (order of seconds) are clearly faster than those based on pure ZnO (order of minutes). Higher O2 pressure results in better crystalline quality of BexCdyZn1-x-yO film and thus lower dark current and faster photoresponse in the device due to the decrease of oxygen vacancy-related defects under oxygen-rich growth conditions. These results indicate that oxygen pressure plays an important role in the growth of high-quality BexCdyZn1-x-yO alloy films, which have great potential in fabricating high-performance ultraviolet photodetectors.

中文翻译:

氧气压力对PLD生长的Be和Cd共取代的用于紫外光电探测器的ZnO合金薄膜的影响

摘要 我们报告了通过脉冲激光沉积在 c 面蓝宝石衬底上合成 Be 和 Cd 共取代的 ZnO (BexCdyZn1-x-yO) 四元合金薄膜。结果表明,所有沉积薄膜均呈现单相纤锌矿结构,表面粗糙度小于 1.5 nm。通过在生长过程中调节 O2 压力,薄膜的光学带隙从 ~3.3 到 ~3.52 eV。在 5 V 偏压下,基于 BexCdyZn1-x-yO 的光电探测器在紫外区表现出显着的光响应,具有低暗电流(~16.2 pA)和高探测率(9.31 × 1010 Jones)。基于 BexCdyZn1-x-yO(秒级)的光电探测器的上升和衰减时间明显快于基于纯 ZnO(分钟级)的探测器。由于在富氧生长条件下氧空位相关缺陷的减少,更高的 O2 压力导致 BexCdyZn1-x-yO 膜的结晶质量更好,从而降低了器件中的暗电流和更快的光响应。这些结果表明,氧压在高质量 BexCdyZn1-x-yO 合金薄膜的生长中起着重要作用,在制造高性能紫外光电探测器方面具有巨大潜力。
更新日期:2020-08-01
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