In this paper, we report a two-dimensional (2D) Thermoresistive Micro Calorimetric Flow (TMCF) sensor by using a $0.35~\mu \text{m}$ 2P4M CMOS MEMS technology. For the airflow, the fabricated and the open-space packaged 2D flow sensor system achieved the highest normalized sensitivity of 32 mV/W/(m/s) with respect to input heating power and gain. To overcome the sensor output drifting issue due to the locally redistributed fluid flow near the bonding wires, a digital signal conditioning algorithm using the inverse distance weighting (IDW) method, instead of the conventional fitting method with sine and cosine function, was proposed. Accordingly, the calibrated 2D flow sensor showed an improved velocity accuracy of ±4% and the angle accuracy of ±3° for an input airflow from 0 to 20 m/s. Therefore, the developed highly sensitive 2D TMCF sensor will be a promising device for the airflow measurement in the smart buildings and the meteorological monitoring system. [2019-0259]

中文翻译：

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具有高灵敏度和更高精度的二维 CMOS MEMS 热流量传感器

在本文中，我们报告了使用 $0.35~\mu \text{m}$ 2P4M CMOS MEMS 技术的二维 (2D) 热阻微量热流 (TMCF) 传感器。对于气流，制造和开放空间封装的 2D 流量传感器系统在输入加热功率和增益方面实现了 32 mV/W/(m/s) 的最高归一化灵敏度。为了克服由于接合线附近局部重新分布的流体流动引起的传感器输出漂移问题，提出了一种使用反距离加权（IDW）方法的数字信号调节算法，而不是具有正弦和余弦函数的传统拟合方法。因此，校准后的 2D 流量传感器在输入气流从 0 到 20 m/s 的情况下，速度精度提高了 ±4%，角度精度提高了 ±3°。所以，开发的高灵敏度 2D TMCF 传感器将成为智能建筑和气象监测系统中气流测量的有前途的设备。[2019-0259]