A stable flexible pressure array sensor is a key point for the development of smart robotics and prosthetic solutions. Traditional flexible pressure sensors are mainly based on piezoresistive, capacitive, and piezoelectric effect. However, pressure array sensors based on these principles need complicated wire links and complex fabrication processes. In addition, sensors based on capacitors are susceptible to interference, while piezoresistive sensors have drift problems. In this paper, a vision‐based flexible device integrating a transparent substrate with a black micropillar array is proposed. An image sensor is introduced to measure pillar sectional‐area variation caused by external pressure. Low‐cost precision machining is used to make the mold which avoids complex fabrication process in terms of lithography process. Fabricating micropillars and substrate respectively with Ecoflex gel and polydimethylsiloxane (PDMS) implies adhesion of two polymer materials. The sensor demonstrates a considerable pressure sensitivity of 0.133 kPa⁻¹ in the pressure range 0–3 kPa owing to the softness of Ecoflex gel. Application in high‐density pressure distribution measurement such as braille reading and shape recognition is presented. The device is also believed to have promising potential applications in wearable devices, for example, arterial pulse signal measurements.

中文翻译：

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使用图像传感器的高密度压力传感柔性微柱阵列

稳定的柔性压力阵列传感器是开发智能机器人技术和假肢解决方案的关键。传统的柔性压力传感器主要基于压阻，电容和压电效应。然而，基于这些原理的压力阵列传感器需要复杂的电线连接和复杂的制造过程。另外，基于电容器的传感器容易受到干扰，而压阻传感器则存在漂移问题。本文提出了一种基于视觉的柔性设备，该设备将透明基板与黑色微柱阵列集成在一起。引入图像传感器来测量由外部压力引起的立柱截面积变化。低成本精密加工用于制造模具，从而避免了光刻工艺方面的复杂制造过程。分别用Ecoflex凝胶和聚二甲基硅氧烷（PDMS）制造微柱和基底意味着两种聚合物材料的粘合。该传感器显示出相当高的压力灵敏度，为0.133 kPa由于Ecoflex凝胶的柔软性，在0–3 kPa的压力范围内为^-1。介绍了在盲文读取和形状识别等高密度压力分布测量中的应用。还认为该装置在可穿戴装置中具有有希望的潜在应用，例如，动脉脉冲信号测量。