Soft lithography enables rapid microfabrication of many types of microsystems by replica molding elastomers into master molds. However, master molds can be very costly, hard to fabricate, vulnerable to damage, and have limited casting life. Here, an approach for the multiplication of master molds into monolithic thermoplastic sheets for further soft lithographic fabrication is introduced. The technique is tested with master molds fabricated through photolithography, mechanical micromilling as well as 3D printing, and the results are demonstrated. Microstructures with submicron feature sizes and high aspect ratios are successfully copied. The copying fidelity of the technique is quantitatively characterized and the microfluidic devices fabricated through this technique are functionally tested. This approach is also used to combine different master molds with up to 19 unique geometries into a single monolithic copy mold in a single step displaying the effectiveness of the copying technique over a large footprint area to scale up the microfabrication. This microfabrication technique can be performed outside the cleanroom without using any sophisticated equipment, suggesting a simple way for high-throughput rigid monolithic mold fabrication that can be used in analytical chemistry studies, biomedical research, and microelectromechanical systems.

中文翻译：

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用于软光刻的聚碳酸酯热成型。

通过将弹性体复制模制到母模中，软光刻技术可以快速微细加工多种类型的微系统。然而，母模可能非常昂贵，难以制造，容易损坏并且铸造寿命有限。在此，介绍了一种将母模繁殖为整体热塑性片材以进行进一步软光刻的方法。该技术已通过光刻，机械微铣以及3D打印制成的母模进行了测试，并证明了结果。具有亚微米特征尺寸和高长宽比的微结构已成功复制。定量表征了该技术的复制保真度，并对通过该技术制造的微流体装置进行了功能测试。这种方法还用于在一个步骤中将具有多达19种独特几何形状的不同母模组合到一个整体式复制模具中，从而在较大的占地面积上显示复制技术的有效性，以扩大微型制造规模。这种微细加工技术可以在洁净室之外进行，而无需使用任何复杂的设备，这为高通量刚性整体模具制造提供了一种简单的方法，可用于分析化学研究，生物医学研究和微机电系统。