We develop a laser-assisted sensor embedding process to embed all-glass optical fiber sensors into bulk ceramics for high-temperature applications. A specially designed two-step microchannel was fabricated on an Al₂O₃ substrate for sensor embedment using a picosecond (ps) laser. An optical fiber Intrinsic Fabry-Perot Interferometer (IFPI) sensor was embedded at the bottom of the microchannel and covered by Al₂O₃ slurry which was subsequently sintered by a CO₂ laser. The sensor spectrum was in-situ monitored during the laser sintering process to ensure the survival of the sensor and optimize the laser sintering parameters. By testing in furnace through high temperature, the embedded optical fiber shows improved stability after CO₂ laser sealing, resulting in the linear temperature response of the embedded optical fiber IFPI sensor. To improve the embedded IFPI sensor for thermal strain measurement, a dummy fiber was co-embedded with the sensing fiber to improve the mechanical bonding between the sensing fiber and the ceramic substrate so that the thermal strain of the ceramic substrate can apply on the sensing fiber. The response sensitivity, measurement repeatability and high-temperature long-term stability of the embedded optical fiber IFPI sensor were evaluated in this work.

我们开发了一种激光辅助传感器嵌入工艺，以将全玻璃光纤传感器嵌入用于高温应用的块状陶瓷中。在皮秒（ps）激光器上，将特殊设计的两步微通道制造在用于传感器嵌入的Al ₂ O ₃基板上。光纤固有法布里-珀罗干涉仪（IFPI）传感器嵌入微通道的底部，并被Al ₂ O ₃浆液覆盖，随后用CO ₂进行烧结。激光。在激光烧结过程中对传感器光谱进行了现场监测，以确保传感器的寿命并优化激光烧结参数。通过在高温炉中进行测试，嵌入式光纤在CO ₂照射后显示出更高的稳定性。激光密封，导致嵌入式光纤IFPI传感器的线性温度响应。为了改进嵌入式IFPI传感器以进行热应变测量，将虚拟光纤与传感光纤共嵌入，以改善传感光纤与陶瓷基板之间的机械结合，从而使陶瓷基板的热应变可以施加到传感光纤上。在这项工作中评估了嵌入式光纤IFPI传感器的响应灵敏度，测量重复性和高温长期稳定性。