Abstract We investigate the characteristics of the error surface shape (ESS) induced by spatial attitude variations (SAVs) of the tested surface in the phase measuring deflectometry (PMD) system. In a PMD system, the spatial attitude of the target mirror might deviate from its initial status due to the instability and the stress release of the assembly structure. According to the principle of the PMD, there are such three SAVs as displacement, pitch and yaw angle of the target mirror that will bring about the ESS. In this paper, the principle of the ESS induced by the three SAVs are measured and analyzed based on an established PMD system. Based on the ESS characteristics, a two-step reset method (TSRM) is proposed to reset the spatial attitude of the target mirror in high precision. Experimental results verify that the PMD system could be used to monitor the SAVs of the target mirror and accurately reset it by using the TSRM; the measurement and alignment performance of the PMD system would definitely be improved accordingly.

中文翻译：

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相位测量偏转系统误差面形特性及空间姿态变化复位的实验研究

摘要 我们研究了相位测量偏转 (PMD) 系统中被测表面的空间姿态变化 (SAV) 引起的误差表面形状 (ESS) 的特征。在 PMD 系统中，由于装配结构的不稳定性和应力释放，目标镜的空间姿态可能会偏离其初始状态。根据PMD的原理，有目标镜的位移、俯仰和偏航角这三种SAV会导致ESS。在本文中，基于已建立的 PMD 系统测量和分析了由三个 SAV 引起的 ESS 的原理。基于ESS特性，提出了一种两步重置方法(TSRM)，以高精度重置目标镜的空间姿态。实验结果验证了PMD系统可用于监测目标镜的SAV并使用TSRM进行准确复位；PMD系统的测量和对准性能肯定会相应提高。