A thermodynamic approach based on the concept of nonlocal thermoelastic peaks (NTP), which are generated by implanted ions, is used to explain the structure formation and stress state in TiN coatings synthesized by plasma immersion ion implantation and deposition by filtered vacuum-arc plasma. The radius, the depth of the accumulation and the temperature in the NTP are determined, depending on the energy that the ions acquire under the action of the accelerating potential. The structure and compressive stress level in the coatings are considered together, as a result of the competition between two different atomistic processes in the NTP: radiation-induced defects formation and their removal due to thermal migration. It is supposed that the result of competition provides a minimum of free energy of the synthesized coating. A structure-stress state diagram of nitride coatings deposited under conditions of ion implantation is proposed. Relaxation processes in coatings associated with decrease of stress and change of texture from [111] to [110] or [100] are activated when the peaks temperature exceeds 1/3 of the melting point T_m.

基于注入离子产生的非局部热弹性峰（NTP）概念的热力学方法，用于解释等离子体浸没离子注入和过滤的真空电弧等离子体沉积合成的TiN涂层中的结构形成和应力状态。确定NTP中的半径，累积深度和温度，这取决于离子在加速电势的作用下获取的能量。作为NTP中两个不同原子过程之间竞争的结果，涂层中的结构和压应力水平被综合考虑：辐射引起的缺陷形成和由于热迁移而消除的缺陷。据推测，竞争的结果提供了合成涂层的最小自由能。提出了离子注入条件下沉积的氮化物涂层的结构应力状态图。当峰值温度超过熔点的1/3时，会激活与应力降低和纹理从[111]变为[110]或[100]相关的涂层松弛过程。Ť_米。