Film uniformity is an issue in many deposition processes, especially in substrates with elongated lateral dimensions such as fibers. In this study, a plasma chamber was designed with dual electrodes to improve the uniformity of plasma polymer films. Plasma‐polymerized acrylic acid films were deposited via single‐electrode or double‐electrode configurations onto silicon wafer pieces placed at the center of the chamber to mimic the potential position of a fiber. A radial and spatial map of film chemistry and thickness throughout the chamber was determined which demonstrated improved radial uniformity and film stability using the dual‐electrode configuration, thus highlighting the importance of spatial characterization when designing a reactor for the coating of three‐dimensional objects such as fibers.

中文翻译：

---

用于改善径向和轴向薄膜均匀性的等离子体腔室的设计和特性

在许多沉积工艺中，尤其是在横向尺寸较长的基材（例如纤维）中，薄膜均匀性是一个问题。在这项研究中，设计了一个带有双电极的等离子体腔，以改善等离子体聚合物薄膜的均匀性。等离子聚合的丙烯酸薄膜通过单电极或双电极配置沉积到放置在腔室中央的硅片上，以模拟纤维的潜在位置。确定了整个腔室中膜化学物质和厚度的径向和空间图，这表明使用双电极配置改善了径向均匀性和膜稳定性，因此突出了在设计用于三维物体涂层的反应器时进行空间表征的重要性作为纤维。