We report a tunable terahertz (THz) metamaterial absorber (MA) actuated by thermomechanical bimaterial microcantilevers. The THz MA, which is suspended on a silicon substrate by the bimaterial microcantilevers, is a sandwich structure with a bottom Al ground plane, middle air and SiN_x dielectric layers, and a top Al rotationally symmetric open split ring resonator. Upon application of a current, a Ti heating resistor integrated on the SiN_x dielectric layer induces the bimaterial microcantilevers to bend, causing the air layer thickness to change, modulating the absorption of the THz MA. The tunable THz MA exhibited a relative modulation depth of absorption of 28.1% at 0.69 THz and a thermomechanical sensitivity of 0.12°/K. This tunable THz MA has potential applications in filtering, modulation, control, and THz imaging.

中文翻译：

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由热机械双材料微悬臂驱动的可调谐太赫兹超材料吸收器

我们报告了由热机械双材料微悬臂梁致动的可调太赫兹（THz）超材料吸收器（MA）。THz MA通过双材料微悬臂悬挂在硅基板上，是一种三明治结构，具有底部Al接地层，中间空气层和SiN _x介电层，以及顶部Al旋转对称的开口裂环谐振器。施加电流后，SiN _x上集成了一个Ti加热电阻器电介质层会引起双材料微悬臂弯曲，从而导致空气层厚度发生变化，从而调节THz MA的吸收。可调的THz MA在0.69 THz处表现出28.1％的相对吸收吸收深度，而热机械灵敏度为0.12°/ K。这种可调的THz MA具有在滤波，调制，控制和THz成像中的潜在应用。