The silicon surface texture significantly affects the current density and efficiency of perovskite/silicon tandem solar cells. However, only a few studies have explored fabricating perovskite on textured silicon and the effect of texture on perovskite films because of the limitations of solution processes. Here we produce conformal perovskite on textured silicon with a dry two-step conversion process that incorporates lead oxide sputtering and direct contact with methyl ammonium iodide. To separately analyze the influence of each texture structure on perovskite films, patterned texture, high-resolution photoluminescence (μ-PL), and light beam-induced current (μ-LBIC), 3D mapping is used. This work elucidates conformal perovskite on textured surfaces and shows the effects of textured silicon on the perovskite layers with high-resolution 3D mapping. This approach can potentially be applied to any type of layer on any type of substrate.

硅表面纹理显着影响钙钛矿/硅串联太阳能电池的电流密度和效率。然而，由于溶液工艺的局限性，只有少数研究探索了在纹理硅上制造钙钛矿以及纹理对钙钛矿薄膜的影响。在这里，我们通过干法两步转化工艺在纹理硅上生产保形钙钛矿，该工艺结合了氧化铅溅射和与甲基碘化铵的直接接触。为了分别分析每种纹理结构对钙钛矿薄膜、图案纹理、高分辨率光致发光 (μ-PL) 和光束感应电流 (μ-LBIC) 的影响，使用了 3D 映射。这项工作阐明了纹理表面上的共形钙钛矿，并通过高分辨率 3D 映射显示了纹理硅对钙钛矿层的影响。