Abstract In this work, ZnO nanorods (NRs) were doped with (0, 3, and 6)% Mn and grown on the glass slide by the Microwave-Assisted Chemical Bath Deposition (MACBD) method, at 80 °C. Al contacts were evaporated on the prepared thin film by thermal evaporation technique to produce metal-semiconductor-metal detector (MSM). The novelty of this work is to obtain a UV detector device that works at room temperature using a simple method and low synthesis temperature. The structural properties and the surface morphology of the prepared samples were investigated. The XRD results of un-doped and Mn-doped Zinc Oxide (MZO) NRs reveals sharp and strong peaks, confirming high crystallinity structure. The FE-SEM images showed that the Zinc Oxide NRs were good-aligned and well distributed throughout the glass substrate. At a room temperature, the fabricated detectors were showed an important difference among the current density of the UV wavelengths 365 nm, 385 nm and dark current density. Under 5 V of the applied source voltage, the responsivity of MSM photodetectors based on MZO (0, 3, and 6)% were (0.0361, 0.044 and 0.0765) A/W at a wavelength 365 nm, (0.0232 and 0.0324 and 0.0391) at UV wavelength of 385 nm, at power density of 40 μW/cm2, respectively. All devices in this work demonstrated high response to the UV radiation and showed almost no response to the visible spectrum.

中文翻译：

---

基于微波辅助化学浴沉积合成的Mn掺杂-ZnO NRS的MSM探测器的增强表征

摘要 在这项工作中，ZnO 纳米棒 (NRs) 掺杂了 (0、3 和 6)% Mn，并通过微波辅助化学浴沉积 (MACBD) 方法在 80 °C 下生长在载玻片上。通过热蒸发技术在制备的薄膜上蒸发铝触点以生产金属 - 半导体 - 金属探测器（MSM）。这项工作的新颖之处在于使用简单的方法和低合成温度获得了一种在室温下工作的紫外检测器装置。研究了制备的样品的结构特性和表面形貌。未掺杂和掺杂 Mn 的氧化锌 (MZO) NR 的 XRD 结果显示出尖锐而强烈的峰，证实了高结晶度结构。FE-SEM 图像显示氧化锌 NR 排列良好，并且在整个玻璃基板上分布良好。在室温下，制造的探测器在紫外波长 365 nm、385 nm 和暗电流密度的电流密度之间显示出重要差异。在 5 V 的外加电源电压下，基于 MZO (0、3 和 6)% 的 MSM 光电探测器的响应率为 (0.0361、0.044 和 0.0765) A/W，波长为 365 nm，(0.0232、0.0324 和 0.0391)紫外波长为 385 nm，功率密度分别为 40 μW/cm2。这项工作中的所有设备都表现出对紫外线辐射的高响应，而对可见光谱几乎没有响应。0324 和 0.0391) 在 385 nm 的紫外波长下，功率密度分别为 40 μW/cm2。这项工作中的所有设备都表现出对紫外线辐射的高响应，而对可见光谱几乎没有响应。0324 和 0.0391) 在 385 nm 的紫外波长下，功率密度分别为 40 μW/cm2。这项工作中的所有设备都表现出对紫外线辐射的高响应，而对可见光谱几乎没有响应。