In the present work, the influence of silicon content on the surface blistering of ZrSiN nanocomposite films after He ion irradiation (energy of 30 keV and doses up to 8 × 10¹⁶ cm⁻²) and post-radiation annealing at the temperature of 600 °C was investigated. Using SEM, TEM and AFM methods, the influence of amorphous/crystalline boundaries on the formation of blisters in the n-ZrN/a-Si₃N₄ nanocomposites was studied. ZrSiN nanocomposite films (~300 nm thick) were deposited at 600 °C onto (001) Si wafers by reactive unbalanced magnetron sputtering technique. Silicon concentration was varied from 7.1 to 23.1 at.%. While helium ion irradiation (at the dose of 8 × 10¹⁶ cm⁻²) did not change the surface morphology of the nanocomposite films, the alteration of the surface was observed after vacuum annealing. It was revealed that post-radiation annealing (600 °C) of ZrN and Si₃N₄ mononitride films resulted in surface blistering at the dose of 5 × 10¹⁶ cm⁻². Rather low blister density (0.017 μm⁻²) after post-radiation annealing at the dose of 5 × 10¹⁶ cm⁻² was also observed for the nanocomposite film with 7.1 at.% Si content. As the irradiation dose increased up to 8 × 10¹⁶ cm⁻², the surface density of blisters raised significantly (0.53 μm⁻²). It was found that increasing of Si concentration in the nanocomposite films was beneficial for their radiation resistance. The ZrSiN nanocomposite film with maximum Si content of 23.1 at.% was the most stable, with no sign of surface blistering being detected.

在目前的工作中，硅含量对He离子辐照（能量为30 keV，剂量最高为8×10 ¹⁶  cm ^-2）和600°C的辐照后退火后ZrSiN纳米复合膜表面起泡的影响研究了C。使用SEM，TEM和AFM方法，研究了非晶/晶界对n-ZrN / a-Si ₃ N ₄纳米复合材料中水泡形成的影响。通过反应性不平衡磁控溅射技术在600°C下将ZrSiN纳米复合膜（约300 nm厚）沉积在（001）Si晶片上。硅浓度从7.1变化到23.1at。％。同时进行氦离子照射（剂量为8×10 ¹⁶  cm ^-2）没有改变纳米复合膜的表面形态，在真空退火后观察到表面的变化。发现ZrN和Si ₃ N ₄单氮化物膜的辐射后退火（600℃）导致以5×10 ¹⁶  cm ^-2的剂量产生表面起泡。对于Si含量为7.1at。％的纳米复合膜，在以5×10 ¹⁶  cm ^-2的剂量进行辐射后退火之后，也观察到较低的起泡密度（0.017μm ^-2）。随着辐照剂量增加至8×10 ¹⁶  cm ^-2，水泡的表面密度显着升高（0.53μm ^-2）。已经发现，增加纳米复合膜中的Si浓度对于其抗辐射性是有益的。最大Si含量为23.1原子％的ZrSiN纳米复合膜是最稳定的，没有发现表面起泡的迹象。