In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip.

中文翻译：

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流通型微流体相对介电常数传感器

在本文中，我们介绍了一种微流体相对介电常数传感器的设计，仿真，制造和表征，其中流体流过一个相互交叉的电极结构。传感器的制造基于绝缘体上的硅（SOI）晶圆，其中通过入口层蚀刻流体的入口和出口，并在器件层中制作叉指式电极。阻抗分析仪用于测量相对介电常数为1至41的各种非导电流体的叉指电极之间的阻抗。该传感器在该相对介电常数范围内显示出良好的线性，并且可以与其他微流体传感器集成在一起。多参数芯片。