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Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres
Surface & Coatings Technology ( IF 5.4 ) Pub Date : 2020-03-20 , DOI: 10.1016/j.surfcoat.2020.125662
Yung-I Chen , Yi-En Ke , Ming-Ching Sung , Li-Chun Chang

Glass molding is widely used for manufacturing high-precision optical elements. Nitride coatings are recommended as protective coatings on glass molding dies. In a die-fixed glass molding system, the molding dies undergo rapid thermal shocks. In this study, near-amorphous Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings with a Si concentration of >14 at.% were prepared. The feasibility of these coatings in the glass molding process was evaluated through rapid thermal cycling annealing in a 15-ppm O2–N2 atmosphere. The cycling annealing test was performed at 270 °C and 580 °C or 600 °C. The heating, holding, and cooling times in the annealing process were 1 min each. The results indicated that Zr–Si–N coatings exhibited superior anti-sticking against SiO2–B2O3–BaO-based glass. The reactions between the nitride coatings and glass were investigated.



中文翻译:

在玻璃成型环境中对Cr–Si–N,Ta–Si–N和Zr–Si–N涂层进行快速热退火

玻璃模制被广泛用于制造高精度光学元件。推荐使用氮化物涂层作为玻璃成型模具上的保护涂层。在固定于模具的玻璃成型系统中,成型模具会遭受快速的热冲击。在这项研究中,制备了Si浓度> 14 at。%的近非晶Cr-Si-N,Ta-Si-N和Zr-Si-N涂层。通过在15 ppm O 2 -N 2气氛中进行快速热循环退火,评估了这些涂层在玻璃成型过程中的可行性。循环退火测试在270°C和580°C或600°C下进行。退火过程中的加热,保持和冷却时间各为1分钟。结果表明,Zr-Si-N涂层对SiO 2 -B具有优异的抗粘连性2 O 3 -BaO基玻璃。研究了氮化物涂层与玻璃之间的反应。

更新日期:2020-03-20
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