Transient heat flux sensors are widely used in unsteady thermal analyses. Commercial sensors currently available for high heat flux, however, have relatively low sensitivity. Micromachined thermopile based sensors with advantages of high sensitivity and small size, have been used for the measurement of heat flux produced by black body (usually in the level of W/m²), but not been tried to measure a heat flux on the order of MW/m². In this paper, a high heat flux sensor based on structure-enhanced micromachined thermopile is careful designed and fabricated. Experiments using a powerful laser were conducted at ambient temperature to study the general performance, as well as the limit heat flux, of the sensor. The results show that the output signals have a linear characteristic with heat flux from 0.12 to 1.10 MW/m². The sensitivity and response time of the sensor are $1.50\times 10^{-6}$ Vm²/W and 14 ms at 0.12 MW/m², respectively. The sensor exhibits excellent repeatability in more than 200 laser pulses at 0.44 MW/m². Limit check reveals that the sensor remains a good repeatability at 0.77 MW/m² and can survive at 1.10 MW/m². The designed sensor shows a high performance and will provide a new effective path for measuring high heat flux fast and sensitively. [2019-0160]

中文翻译：

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基于微机械热电堆的高热通量传感器

瞬态热通量传感器广泛用于非定常热分析。然而，目前可用于高热通量的商用传感器具有相对较低的灵敏度。基于微机械热电堆的传感器具有高灵敏度和小尺寸的优点，已被用于测量黑体产生的热通量（通常在W/m ²级别），但尚未尝试测量量级的热通量兆瓦/米². 在本文中，一种基于结构增强型微机械热电堆的高热通量传感器经过精心设计和制造。在环境温度下使用强大的激光进行实验，以研究传感器的一般性能以及极限热通量。结果表明，输出信号具有线性特性，热通量为 0.12 至 1.10 MW/m ²。传感器的灵敏度和响应时间为 $1.50\乘以 10^{-6}$ Vm ² /W 和 14 ms 分别为 0.12 MW/m ²。该传感器在 0.44 MW/m ^{2 的}200 多个激光脉冲中表现出出色的可重复性。极限检查表明，该传感器在 0.77 MW/m ^{2 时}仍保持良好的可重复性，并且可以在 1.10 MW/m ^{2 时继续工作}。所设计的传感器具有高性能，将为快速灵敏地测量高热通量提供新的有效途径。[2019-0160]