Sensitivity improvement and measurable pressure limit extension of Pirani vacuum gauge are urgent needed for meeting the rapid growing requirements in ultra-low and wide-range pressure applications. However, the adjustable range of measureable pressure of the Pirani vacuum gauge is limited to only several orders of magnitude of vacuum range. In this work, a fusion method was proposed to improve the sensitivity and extend the measurable pressure limit of the wafer-level packaged Pirani gauge for meeting the wider applications. An analytical temperature model was presented for estimating the electrothermal behavior of the suspended micro-heater with multi heat dissipation paths. The results calculated by the model are validated by the test results of Pirani gauges with both three and four heat sinks. The results indicate that the model for Pirani gauge with one heat sink structure will no longer make sense for devices with multi heat sinks. The electrical fusion of the Pirani gauges with these structure parameters extends dynamic range from 1 ~ 10⁴ Pa to that of $6 \times 10^{-2} \sim 10^{4}$ Pa, which generates one more sensitivity peak compared to one single device. The sensitivity peaks are $5.7 \times 10^{3}$ K/W/decade and $3.4 \times 10^{3}$ K/W/decade around the upper and lower limits, respectively. [2019-0201]

中文翻译：

---

多散热器皮拉尼真空计灵敏度提高和可测压限扩展的融合机制研究

皮拉尼真空计的灵敏度提高和可测量的压力极限扩展迫切需要满足超低和宽范围压力应用中快速增长的需求。然而，皮拉尼真空计的可测量压力的可调范围仅限于真空范围的几个数量级。在这项工作中，提出了一种融合方法来提高灵敏度并扩展晶片级封装皮拉尼真空计的可测量压力极限，以满足更广泛的应用。提出了一种分析温度模型，用于估计具有多散热路径的悬挂式微型加热器的电热行为。模型计算的结果得到了具有三个和四个散热器的皮拉尼真空计的测试结果的验证。结果表明，具有一个散热器结构的皮拉尼规模型对于具有多个散热器的设备将不再有意义。具有这些结构参数的皮拉尼真空计的电气融合扩展了 1 ~ 10 的动态范围⁴ Pa 到 $6 \times 10^{-2} \sim 10^{4}$ Pa，与单个设备相比，它会产生一个更多的灵敏度峰值。灵敏度峰值为 $5.7 \times 10^{3}$ K/W/十年和 $3.4 \times 10^{3}$ K/W/decade 分别围绕上限和下限。[2019-0201]