Abstract On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

中文翻译：

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用于精密制造的在机和过程中表面测量

摘要 在机和加工中表面测量对于精密表面制造中的质量控制非常重要。解决了机器上和过程中表面测量的分类、要求和任务。展示了最先进的机器上和过程中测量系统和传感器技术。概述了用于消除机床误差的误差分离算法，这是在机和加工表面计量中特别需要的，然后讨论了校准和可追溯性。然后展示了采样策略、测量系统-机床接口、数据流和分析以及补偿制造反馈方面的先进技术。还讨论了未来的挑战和发展趋势。