In the ultra-precision manufacturing of large optics, industrial robots have the potential to become an intelligent and economical choice of surface polishing. However, the transport of the workpieces between the polishing platform and the measurement instrument seriously limits the manufacturing efficiency. Therefore, an in-situ measurement system based on the monoscopic deflectometry is developed to determine the form quality of the optical lenses during rough polishing. Stray light reflected from the lower surface of transparent lenses may degrade the measuring quality, thus an effective absolute phase retrieval algorithm is developed to decouple the superposed fringes associated with the upper and lower surfaces. Then, the form of the upper surface under polishing can be reconstructed to guide the subsequent polishing. Experimental results demonstrate that the accuracy of the method is comparable to that of the coordinate measuring machine, consequently the manufacturing efficiency and reliability of large optical workpieces can be greatly improved.

在大型光学器件的超精密制造中，工业机器人有潜力成为表面抛光的明智且经济的选择。然而，工件在抛光平台和测量仪器之间的运输严重地限制了制造效率。因此，开发了基于单视场偏转法的原位测量系统以确定在粗抛光期间光学透镜的形状质量。从透明透镜的下表面反射的杂散光可能会降低测量质量，因此开发了一种有效的绝对相位检索算法来解耦与上，下表面相关的重叠条纹。然后，可以重建抛光下的上表面的形式以引导随后的抛光。