The capacitive angle sensor has good output linearity, high precision and good dynamic response. The designed sensor probe has a differential multilayer ring structure, which greatly increases the positive area of the microplate and effectively improves the range and measurement accuracy of the sensor. In addition, CAV444 and ADS1115 are used to construct the signal processing circuit system, which reduces the interference of parasitic capacitance, suppresses common mode interference, and improves measurement accuracy and sensitivity. Large range and small range calibration experiments were carried out respectively, and the nonlinear errors of the three fitting methods of polynomial, Fourier function, and sine function were analyzed. The experimental results show that in range of 0–360°, the precision of sensor is 1°, the sensitivity is 0.0198 V/°, the minimum nonlinear error is 4.89%, the hysteresis error is less than 3.72%, and the repeatability error is less than 1.78%; in range of 0–0.688°, the precision is 0.05°, the sensitivity is 4.82 V/°, the nonlinear error is 0.42%, the hysteresis error is less than 0.20%, and the repeatability error is less than 0.16%. Results indicate that the designed capacitive angle sensor has good output linearity, high precision and good dynamic response.

电容式角度传感器具有良好的输出线性度，高精度和良好的动态响应。设计的传感器探头具有差分多层环结构，大大增加了微孔板的正面积，并有效地改善了传感器的范围和测量精度。此外，CAV444和ADS1115用于构建信号处理电路系统，可减少寄生电容的干扰，抑制共模干扰，并提高测量精度和灵敏度。分别进行了大范围和小范围校准实验，分析了多项式，傅里叶函数和正弦函数三种拟合方法的非线性误差。实验结果表明，在0-360°范围内，传感器的精度为1°，灵敏度为0.0198 V /°，最小非线性误差为4.89％，磁滞误差小于3.72％，重复性误差小于1.78％；在0-0.688°范围内，精度为0.05°，灵敏度为4.82 V /°，非线性误差为0.42％，磁滞误差小于0.20％，重复性误差小于0.16％。结果表明，所设计的电容式角度传感器具有良好的输出线性度，高精度和良好的动态响应。