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Optimization of Shell packaging for cilium MEMS bionic vector hydrophone
Sensors and Actuators A: Physical ( IF 4.6 ) Pub Date : 2020-03-19 , DOI: 10.1016/j.sna.2020.111969
Guojun Zhang , Qingda Xu , Cong Zhang , Shang Chen , Shie Yang

Packaging of vector hydrophone influences its engineering application scope. However, the sensitivity of vector hydrophone is greatly reduced after packaging in previous works. Moreover, the vector hydrophone with dipole directivity has the problem of left-right ambiguity. To solve these problems, the shell packaging of cilium MEMS bionic vector hydrophone is optimized in terms of sound-transparent cap and the capability of underwater localization. A blue nitrile butadiene rubber is used as the material for the sound-transparent cap to solve the problem of poor sensitivity after packaging. And in order to solve the problem of left-right ambiguity of a single vector hydrophone, a piezoelectric ceramic tube is integrated into the shell to obtain sound pressure information. In this paper, the packaging process of optimized shell is introduced in detail. Then, the sensitivity test, directivity test and pressure-resisting test of optimized shell are finished. The testing results show that sensitivity of vector information part is increased average 5.6 dB after packaging. And the sensitivity curve depicts that the sensitivity increases 6 dB per octave in the working bandwidth in the range of 63−1000 Hz. Therefore, the optimized vector hydrophone shows a good performance in engineering application.



中文翻译:

纤毛MEMS仿生矢量水听器外壳封装的优化

矢量水听器的包装影响其工程应用范围。但是,矢量水听器的灵敏度在以前的工作中包装后大大降低了。而且,具有偶极方向性的矢量水听器具有左右歧义的问题。为了解决这些问题,在透声帽盖和水下定位能力方面优化了cilium MEMS仿生矢量水听器的外壳。蓝色丁腈橡胶被用作透明盖的材料,以解决包装后灵敏度差的问题。并且为了解决单个矢量水听器的左右歧义的问题,将压电陶瓷管集成到壳体中以获得声压信息。在本文中,详细介绍了优化外壳的包装过程。然后,完成了优化壳的灵敏度测试,方向性测试和耐压测试。测试结果表明,封装后矢量信息部分的灵敏度平均提高了5.6 dB。灵敏度曲线表明,在63-1000 Hz的工作带宽内,灵敏度每倍频程增加6 dB。因此,优化的矢量水听器在工程应用中表现出良好的性能。灵敏度曲线表明,在63-1000 Hz的工作带宽内,灵敏度每倍频程增加6 dB。因此,优化的矢量水听器在工程应用中表现出良好的性能。灵敏度曲线表明,在63-1000 Hz的工作带宽内,灵敏度每倍频程增加6 dB。因此,优化的矢量水听器在工程应用中表现出良好的性能。

更新日期:2020-03-19
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