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Microstructure and mechanical, electrical, and electrochemical properties of sputter-deposited multicomponent (TiNbZrTa)Nx coatings
Surface & Coatings Technology ( IF 5.4 ) Pub Date : 2020-03-19 , DOI: 10.1016/j.surfcoat.2020.125651
Rui Shu , Eirini-Maria Paschalidou , Smita G. Rao , Jun Lu , Grzegorz Greczynski , Erik Lewin , Leif Nyholm , Arnaud le Febvrier , Per Eklund

A series of (TiNbZrTa)Nx coatings with a thickness of ~1.1 μm were deposited using reactive magnetron sputtering with segmented targets. The deposition temperature was varied from room temperature to 700 °C resulting in coatings with different microstructures. The coatings were characterized by electron microscopy, atomic force microscopy, compositional analysis, and X-ray diffraction. Effects of the deposition temperature on the electrical, mechanical and corrosion properties were studied with four-point probe, nanoindentation and potentiodynamic polarization measurements, respectively. X-ray photoelectron spectroscopy (XPS) analyses reveal a gradual change in the chemical state of all elements with increasing growth temperature from nitridic at room temperature to metallic at 700 °C. A NaCl-type structure with (001) preferred orientation was observed in the coating deposited at 400 °C, while an hcp structure was found for the coatings deposited above 400 °C. The resistivities of the TiNbZrTa nitride coatings were found to be around 200 μΩcm. In 0.1 M H2SO4 aqueous solution, a corrosion current density of 2.8 × 108 A/cm2 and a passive behaviour up to 1.5 V vs. Ag/AgCl were found for the most corrosion resistant coating. The latter corrosion current is about two orders of magnitude lower than that found for a reference hyper-duplex stainless steel.



中文翻译:

溅射沉积多组分(TiNbZrTa)N x涂层的组织,力学,电学和电化学性能

一系列(TiNbZrTa)N x使用具有分段靶的反应磁控溅射沉积厚度约为1.1μm的涂层。沉积温度从室温变化到700°C,导致涂层具有不同的微观结构。通过电子显微镜,原子力显微镜,组成分析和X射线衍射对涂层进行表征。分别用四点探针,纳米压痕和电位动力学极化测量研究了沉积温度对电,机械和腐蚀性能的影响。X射线光电子能谱(XPS)分析显示,随着生长温度的升高,所有元素的化学状态都会发生逐渐变化,从室温的氮化物到700°C的金属。在400°C以上沉积的涂层中发现了hcp结构。发现TiNbZrTa氮化物涂层的电阻率约为200μΩcm。在0.1 MH 2 SO 4水溶液中,2.8×10腐蚀电流密度- 8  A /厘米2和无源行为高达1.5 V,相对于银/氯化银被发现为最耐腐蚀的涂层。后者的腐蚀电流比参考超双相不锈钢的腐蚀电流低大约两个数量级。

更新日期:2020-03-19
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