Arrays of nanoelectromechanical resonators (NEMS) have shown promise for a suite of applications, from nanomechanical information processing technologies to mass spectrometry. A fundamental challenge toward broader adoption of NEMS arrays is a lack of viable frequency tuning methods, which must simultaneously allow for persistent and reversible control of single resonators while also being scalable to large arrays of devices. In this work, we demonstrate an electro-optic tuning method for graphene-based NEMS where locally photoionized charge tensions a suspended membrane and tunes its resonance frequency. The tuned frequency state persists unchanged for several days in the absence of any external power, and the state can be repeatedly written and erased with a high degree of precision. We show the scalability of this technique by aligning the frequencies of several NEMS devices on the same chip, and we discuss implications of this tuning method for both single devices and programmable NEMS networks.

中文翻译：

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使用光致掺杂的纳米机电谐振器的非易失性可重写频率调谐

纳米机电谐振器（NEMS）阵列已显示出从纳米机械信息处理技术到质谱仪等一系列应用的前景。广泛采用NEMS阵列的根本挑战是缺乏可行的频率调谐方法，该方法必须同时允许对单个谐振器进行持久和可逆的控制，同时还可以扩展到大型设备阵列。在这项工作中，我们演示了基于石墨烯的NEMS的电光调谐方法，其中局部光电离的电荷使悬浮膜张紧并调整其共振频率。在没有任何外部电源的情况下，调谐的频率状态会连续几天保持不变，并且可以高精度地重复写入和擦除该状态。