We developed flexible and transparent thin film heaters (TFHs) with a structure of AZO/Ag-SnO_x/AZO/polyimide (PI) which exhibited superior stability under operational conditions. Ultrathin and robust doped silver (Ag) films were produced by introducing a small amount of SnO_x during the sputtering process. The AZO/Ag-SnO_x/AZO stacks showed the best figure of merit value of 139.9, which was higher than that of ITO counterpart (25.5) with the same thickness. In addition, it exhibited excellent durability, which showed unaffected optical and electrical properties under the heat treatment of 500 °C for 30 min in air, highly-accelerated temperature and humidity stress test (HAST) at 121 °C and 97%RH for 36 h, 10,000 times of scratching and 1500 times of inner and outer bending test. Furthermore, the TFHs based on AZO/Ag-SnO_x/AZO/PI achieved a high temperature of 438.8 °C with response time in several seconds, which outperformed most previous studies. The robust high-temperature TFHs in this research hold promising commercial applications in flexible and high temperature occasions.

我们开发了具有AZO / Ag-SnO _x / AZO /聚酰亚胺（PI）结构的柔性透明薄膜加热器（TFHs），该加热器在操作条件下具有出色的稳定性。超薄和强大的掺杂银（Ag）膜，通过引入少量的的SnO产生_X在溅射过程。AZO / Ag-SnO _x/ AZO叠层的最佳品质因数值为139.9，高于具有相同厚度的ITO对应的最佳品质因数（25.5）。此外，它还具有出色的耐久性，在空气中500°C热处理30分钟，121°C的高加速温湿度试验（HAST）和36％的相对湿度为36％时，其光学和电气性能均未受影响。 h，10,000次刮擦和1500次内部和外部弯曲测试。此外，基于AZO / Ag-SnO _x / AZO / PI的TFH达到了438.8°C的高温，响应时间在几秒钟内，超过了大多数以前的研究。这项研究中坚固的高温TFH在柔性和高温场合具有广阔的商业应用前景。