The tunable range of RF/microwave devices is limited not only due to the difficulty in growing high-quality magnetic oxide thin films but also because of their low magnetostrictive coefficient as in Y₃Fe₅O₁₂ (YIG) thin films. In this work, we have fabricated flexible YIG thin films by using pulsed laser deposition (PLD) technology, which exhibit a low-damping constant (2.67 × 10⁻⁴) and well-established magnetic properties suitable for RF/microwave materials. A noticeable ferromagnetic resonance (FMR) field shift of 180 Oe was obtained along the out-of-plane direction via a flexible tunable factor f(R), which results in a frequency shift as high as 550 MHz. The result shows a greater FMR tuning than that induced by ferroelectric single crystals. At the same time, a systematic theoretical framework for tuning FMR characteristics was presented for the flexible YIG/mica thin films, which would provide an effective tuning method for other flexible magnetic oxides with low magnetostrictive coefficients. Last but not least, a flexible coplanar waveguide (CPW) integrated with the flexible YIG thin films shows excellent microwave magnetic stability and fatigue-resistant behavior. It would open a new door for further applications, such as flexible spiral detectors and high-frequency signal processors in the near future.

中文翻译：

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用于可调射频/微波处理器的低阻尼柔性Y3Fe5O12薄膜

RF /微波设备的可调范围不仅受到难以生长高质量磁性氧化物薄膜的限制，而且还由于其与Y ₃ Fe ₅ O ₁₂（YIG）薄膜一样的低磁致伸缩系数而受到限制。在这项工作中，我们通过使用脉冲激光沉积（PLD）技术制备了柔性YIG薄膜，该薄膜显示出低阻尼常数（2.67×10 ^-4）和成熟的适用于RF /微波材料的磁性能。通过灵活的可调因子f（R）沿平面外方向获得了180 Oe的明显铁磁共振（FMR）场移），导致频移高达550 MHz。结果表明，与铁电单晶相比，FMR调谐效果更好。同时，为柔性YIG /云母薄膜的FMR特性调谐提供了系统的理论框架，这将为低磁致伸缩系数的其他柔性磁性氧化物提供有效的调谐方法。最后但并非最不重要的一点是，与柔性YIG薄膜集成在一起的柔性共面波导（CPW）显示了出色的微波磁稳定性和抗疲劳性能。它将在不久的将来为进一步的应用打开新的大门，例如柔性螺旋检测器和高频信号处理器。