A sacrificial-layer assisted one-step transfer printing method is presented to fabricate a three-layer dry electrode for detecting electrophysiological signals. First, an Au electrode layer was deposited on a silicon wafer covered by a Cu sacrificial layer. Then, a polyimide (PI) intermediate layer was patterned on the Au layer by a standard photolithography process, and subsequently the Au layer was patterned by wet etching, using the patterned PI layer as the etching mask. Finally, both the patterned Au layer and PI layer were transferred onto a stretchable film in one step to make a three-layer dry electrode by etching away the Cu sacrificial layer. This three-layer dry electrode exhibited excellent conformability and stretchability and low electrode-skin contact impedance. The performance of the three-layer dry electrode for long-term and dynamic electrocardiogram (ECG) monitoring was also examined. The quality of ECG signals was well maintained for 48 h, during which period the signal to noise ratio was kept at 40 dB. It was also found that the physical exercises had only slight effects on the ECG signal, where all features of the signal were clearly distinguishable when the volunteer ran at 5 km/h.

提出了一种牺牲层辅助的一步转印法，以制备用于检测电生理信号的三层干电极。首先，将Au电极层沉积在被Cu牺牲层覆盖的硅晶片上。然后，通过标准的光刻工艺在Au层上对聚酰亚胺（PI）中间层进行构图，然后，使用图案化的PI层作为蚀刻掩模，通过湿法蚀刻对Au层进行构图。最后，将图案化的Au层和PI层都一步转移到可拉伸膜上，以通过蚀刻掉Cu牺牲层而制成三层干电极。该三层干电极表现出优异的贴合性和可拉伸性以及低的电极-皮肤接触阻抗。还检查了用于长期和动态心电图（ECG）监测的三层干电极的性能。ECG信号的质量可以保持48小时，在此期间信噪比保持在40 dB。还发现体育锻炼对ECG信号的影响很小，当志愿者以5 km / h的速度跑动时，信号的所有特征都可以清楚地区分。